Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology

نویسندگان

چکیده

Real time monitoring of contamination on antireflection (AR) silica coatings in high peak power laser systems (HPLs) is critically needed order to avoid reductions transmission and damage optical surfaces. Herein we proposed apply a surface acoustic wave (SAW) sensor real-time monitor trace amounts airborne molecular contaminants (AMCs) adsorbed the AR coatings. The coating found be susceptible AMCs because its mesoporous structure, huge area polar nature. caused increased mass SAW sensor, which resulted significant increase frequency shift. fabricated showed sensitivity ∼-490 mm2 ng−1Hz an excellent linearity vs. areal density since shift linearly related change coating.

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ژورنال

عنوان ژورنال: Sensors and Actuators A-physical

سال: 2021

ISSN: ['0924-4247', '1873-3069']

DOI: https://doi.org/10.1016/j.sna.2021.112796